Freescale Semiconductor
Technical Data
MPXHZ6400A
Rev 0, 08/2005
Media Resistant and
High
Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The Freescale MPXHZ6400A series sensor integrates on-chip, bipolar op
amp circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the Freescale pressure sensor a logical and economical choice
for the system designer.
The MPXHZ6400A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
Figure 1
shows a block diagram of the internal circuitry integrated on a
pressure sensor chip.
Features
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Improved Accuracy at High Temperature
Available in Small and Super Small Outline Packages
1.5% Maximum Error over 0掳 to 85掳C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated from 鈥?0掳 to +125掳C
Durable Thermoplastic (PPS) Surface Mount Package
MPXHZ6400A
INTEGRATED
PRESSURE SENSOR
20 TO 400 kPA (3.0 TO 58 psi)
0.2 TO 4.8 V OUTPUT
(3.0 TO 58 psi)
SUPER SMALL OUTLINE PACKAGE
MPXHZ6400AC6T1
CASE 1317A-03
PIN NUMBERS
(1)
1
2
3
4
N/C
V
S
GND
V
OUT
5
6
7
8
N/C
N/C
N/C
N/C
Typical Applications
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Industrial Controls
Engine Control/Liquified Petroleum Gas (LPG)
ORDERING INFORMATION
Device
Type
Ported
Element
Options
Case
No.
MPX Series
Order No.
Packing
Options
Device
Marking
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
Absolute, Axial 1317A MPXHZ6400AC6T1 Tape & Reel MPXHZ6400A
Port
漏 Freescale Semiconductor, Inc., 2005. All rights reserved.
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